Merging the Sol–Gel Technique with the Pulsed Microplasma Cluster Source Deposition to Improve Control over the Memristive Response of TiO2 Thin Films

Metal oxide thin films show promising resistive switching properties, making them materials of reference for the development memristive devices. TiO2 is probably one most studied and being synthesized using various techniques, each having specific optimizable characteristics. In this paper, we report on an innovative approach by combining sol–gel pulsed microplasma cluster source (PMCS) methods, exploiting low temperature cost former process precise control over nanocristallinity latter. We that overcomes reported limitations technique shows in fabricating devices when independently used. A side-by-side comparison produced PMCS, sol–gel, PMCS/sol–gel hybrid methods (HM) demonstrates improvement properties a reduction electrical shorts based